제품소개

Product Information

ATS Technology, Inc

제품소개

제품명
UGAPM100/200/300 amu
(Process Monitoring Systems)
제조사
Stanford Research Systems
특징
• Operates from 1 mTorr to 20 Torr
• 100, 200 and 300 amu systems
• <1.5 second response time
• Multi-point analysis
• Multi-range applications
• Almost zero dead volume
• System bakeout
• Sample line heating