제품소개

Product Information

ATS Technology, Inc

제품소개

제품명
PPR100/200/300 amu
(Process monitoring systems)
제조사
Stanford Research Systems
특징
• 0.01, 0.1, 1.0 or 10 Torr inlet pressure
• 3 × 10-5 Torr-L/s flow rate
• 2 second response time (0.1 Torr)
• 100, 200 or 300 amu systems
• 6 orders of magnitude dynamic range
• RGA Windows software