제품소개

Product Information

ATS Technology, Inc

제품소개

제품명
CIS100/200/300 amu
(Closed ion source analyzers)
제조사
Stanford Research Systems
특징
• 100, 200, and 300 amu systems
• 1 ppm detection
• 10 mTorr max. operating pressure
• 1 x 10-12 Torr detection limit
• Real-time RGA Windows software
• Multi-head operation
• RGA and CIS mode