제품소개
Product Information
ATS Technology, Inc
제품소개
- 제품명
- CIS100/200/300 amu
(Closed ion source analyzers)
- 제조사
- Stanford Research Systems
- 특징
- • 100, 200, and 300 amu systems
• 1 ppm detection
• 10 mTorr max. operating pressure
• 1 x 10-12 Torr detection limit
• Real-time RGA Windows software
• Multi-head operation
• RGA and CIS mode